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Yield Improvements In Semiconductor Manufacturing

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This eBook provides an in-depth understanding of all the factors that impact tool success. Fully illustrated, readers will find practical design examples, cost analysis calculations, process data, operating parameters, and tips and techniques — all of the concrete knowledge needed to spark innovation and resolve complex tooling challenges.

Extensively illustrated, showing you hundreds of proven designs and illustrations, this book explains dozens of different types of fixtures. Sixteen chapters show you both basic principles and advanced designs and applications for today's flexible systems and numerically controlled machines.